Webinar Series - BEAMER Training
This training series is a perfect starting point for new users and a good opportunity to extend the BEAMER knowledge for existing users. The series covers all the BEAMER basic training topics, which will show the data preparation for many applications, aiming to improve lithography results.
- What is fracturing and why is it needed?
- Different techniques, e.g. field overlap, field ordering, are discussed to enhance exposure quality, are discussed to enhance exposure quality and reduce tool and process effects such as field stitch errors
- Available layout preparation functionalities are shown
- Proximity effect correction is introduced and PSF related topics are discussed.
Following the training series, the sample flows used during the training are available to users in the “Examples” tab of BEAMER.