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GenISys GmbH
Skip navigation
  • Products
    • BEAMER
    • LAB
    • TRACER
    • MASKER
    • ProSEM
    • InSPEC
  • Applications
    • Bulk & sleeving of patterns for time writing optimisation
    • Fracturing of periodic layouts for photonic crystals
    • Designing Fresnel zone plates using formulas in BEAMER
    • SÜSS-MicroOptics Source Mask Optimisation
    • LAB simulation methods and Optical Proximity Correction in Lithography
    • Multipass Techniques
    • 3D E-beam lithography
    • Using TRACER to Estimate the Base-Dose for Different Substrates
    • Filling arbitrary shapes with tilted gratings
    • Laser Grayscale Lithography
    • Dose Assignments for Exposures on Thin Membranes
    • Exposure Strategies for Optimised Writing
    • Influence of Shape PEC on Resist Profile
    • Projection Simulation Example
    • Managing PEC Data Volume to Improve Throughput
    • Pattern replacement and filtering for post processing
    • Optimisation of relative dose exposure for critical features
    • Loops, Variables and Functions
    • Using Loop module in BEAMER
    • Exposure dose for targets and large areas
    • 3D Correction for Dolan Technique
  • In-Action
    • Webinar Series: Proximity Effect in E-Beam Lithography
    • Webinar Series: BEAMER Training
    • Webinar: LAB Simulation of Proximity Lithography
    • Webinar: LAB Simulation of Projection Lithography
    • Webinar: LAB Simulation of Laser Lithography
    • Webinar: LAB Simulation of E-BEAM Lithography
  • Download
    • BEAMER Download
    • TRACER Download
    • LAB Download
    • VIEWER Download
  • Corporate
    • News & Events
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BEAMER Download

BEAMER Download

 

Windows

64bit

BEAMER-7.3.1_x64.exe (1.0 GiB)

Linux (tar)

Redhat 7 (tar.gz)

BEAMER-7.3.1.el7.x86_64.tar.gz (1.1 GiB)

Redhat 8 (tar.gz)

BEAMER-7.3.1.el8.x86_64.tar.gz (1.1 GiB)

Redhat 9 (tar.gz)

BEAMER-7.3.1.el9.x86_64.tar.gz (1.1 GiB)

Ubuntu 22.04 (tar.gz)

BEAMER-7.3.1.ubuntu2204.x86_64.tar.gz (1.1 GiB)

Ubuntu 24.04 (tar.gz)

BEAMER-7.3.1.ubuntu2404.x86_64.tar.gz (1.1 GiB)

Open SUSE 15.2 (tar.gz)

BEAMER-7.3.1.suse15.2.x86_64.tar.gz (1.1 GiB)

Linux (rpm-deb)

Redhat 7 (rpm)

BEAMER-7.3.1.el7.x86_64.rpm (922.6 MiB)

Redhat 8 (rpm)

BEAMER-7.3.1.el8.x86_64.rpm (927.0 MiB)

Redhat 9 (rpm)

BEAMER-7.3.1.el9.x86_64.rpm (916.1 MiB)

Ubuntu 22.04 (deb)

BEAMER-7.3.1.ubuntu2204.x86_64.deb (921.2 MiB)

Ubuntu 24.04 (deb)

BEAMER-7.3.1.ubuntu2404.x86_64.deb (916.8 MiB)

Open SUSE 15.2 (rpm)

BEAMER-7.3.1.suse15.2.x86_64.rpm (881.8 MiB)

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